Features
Heat resistance guide*: 210°C
Standard hardness (Duro A): 75
It has excellent chemical resistance and can be used for almost all chemical solutions. (Excluding fluorine-based solvents)
There is almost no elution of the metal from chemical solutions.
*The guide for heat resistance differs according to various conditions.
Applications
Sealing for cleaning equipment, coaters and developers (coating and developing equipment), wet etching equipment, and filters