TOMBO™ No. 2670-PFW Rubber O-ring Perfluoro PFW (FFKM)

Features

Heat resistance guide*: 200°C
Standard hardness (Duro A): 70
It experiences little weight reduction when exposed to plasma and has excellent plasma resistance.
*The guide for heat resistance differs according to various conditions.

Applications

Sealing for plasma etching equipment, plasma CVD equipment, etc.

• TOMBO is a registered trademark or trademark of NICHIAS Corporation.
• Name of products with "®" are registered trademarks of NICHIAS Corporation.
• Name of products with "™" are trademarks of NICHIAS Corporation.